Semi-Conductor Industry
The advanced production cleanroom facilities such as microelectronic industry, Wafer manufacturing and semiconductor plants often require the highest purity air and their air quality requirements keep on increasing on a day-to-day basis. When we consider the microelectronic and semiconductor industry the corrosive gases as well as particulate matter becomes a matter of serious concern inside these facilities.
Contaminants enter these facilities through ventilation systems, staff and personnel entering and exiting the production zone as well molecular contaminants produced during the production process itself. Any contamination in the production process will have a huge impact financially as well as economically and these are low-rejection production line.
The integrated circuit Chip manufacturing is a very accurate and precise process. These are high yield and low rejection Industries. The electric conducting paths in these chips gets narrower and narrower (now measured in nano meters) as the size of a single chip gets smaller. Production in advanced fabrication facilities is completely automated and carried out in a hermetically sealed nitrogen environment to improve yield with automated material handling systems taking care of the transport of wafers from machine to machine. Terminal HEPA(H14) and ULPA filters (U15) with ePTFE or glass media is used in these manufacturing facilities to take care of any particulate contaminant since there can be no compromise in the air quality.
At the same time Airborne molecular contaminants also pose a serious threat to microelectronic chips and these molecular contaminants need to be arrested in these facilities produced during the production process as well as those entering from the outside environment such as VOCs, SO2, H2S, NH3 and O3. These gases affect the copper surfaces and silver soldering used in the Printed Circuit Boards. For taking care of these gas phase contaminants, Molecular filters are widely employed in the micro electronic industries.
Certain elements such as antimony, arsenic, boron is used for the production process and these elements can damage the finished product if present in the manufacturing environment. Hence these Contaminants also need to be taken care of. To take care of these elements, we use sPTFE (Poly Tetra Fluro Ethylene) media HEPA / ULPA filters over conventional Micro-glass media.
Our Specialty Products and services Include
- Supply of FFUs with both Molecular & Particulate Filtration Capabilities
- Machine and Equipment Filtration in Chip Manufacturing Industry
- Mask Aligner Filtration and LED, LCD Display protection Filtration
- Supply of Purification systems during initial construction stages of Semi-Conductor Factory
- Molecular Filtration for adsorption of gases like VOC, SO2, H2S, Cl-, NH3, MDS, O3…etc
- Catering to firms that manufacture 12 Inch chip, 3nm-28nm in size
How effectively harmful contaminants are prevented from entering the airflow in production environment depends on the performance of employed air filters in the ventilation system as well. We mean not only the terminal HEPA / UPLA filters but the air filters coming inside the facilities including pre, medium, fine, Ultrafine and molecular filters also. Thus, properly selected air filters will create a barrier to prevent ultra-fine dust particles from entering the production and process clean zone area.
Aeropro is a prominent supplier of filtration products to the Micro Electronic Industry and we Cater to firms manufacturing 12 Inch Chip, 3nm-28nm. We supply air purification filters during initial stage of factory setting up. We also provide Fan Filter Units (FFUs) to these industries with chemical and particulate filtration capabilities. As a specialist in filtration products, we undertake Machine and production equipment filtration also. International firms also seek our assistance for providing Mask Aligner filtration and LCD display protection filtration products which we are very much capable of providing.